Raman spectra of a-SiI_xN,:H films following natural ageing

Abstract

The results are given of a comparison of vibrational spectra for a-Si,N ,,:H films on their natural ageing over the course of four years. The films of a-Si r,N,:H with varying concentrations of NH3, 2%. 4%, and 6%, were prepared from NH3 + SiH4 + H2 gas mixture by plasma deposition. It is revealed that in the films containing 2% NH3 in the mixture, there is crystallization with c-Si separation. However, with 6% and 10% of NH3, the mixture stabilizes the amorphous state and does not influence the vibrational spectra and optical properties of the films